SEMI OpenIR  > 中科院半导体材料科学重点实验室
一种蓝宝石纳米孔状图形衬底的制备方法
王家鑫; 吴奎; 曾一平
Rights Holder中国科学院半导体研究所
Date Available2012-09-19
Country中国
Subtype发明
Subject Area半导体材料
Application Date2012-05-30
Application NumberCN201210174234.9
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/25241
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
王家鑫,吴奎,曾一平. 一种蓝宝石纳米孔状图形衬底的制备方法.
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