| 降低衬底表面残留杂质浓度的方法 | |
| 刘京明; 赵有文; 王凤华; 杨凤云 | |
| Rights Holder | 中国科学院 |
| Date Available | 2013-04-03 ; 2013-04-03 |
| Country | 中国 |
| Subtype | 发明 |
| Subject Area | 半导体材料 |
| Application Date | 2012-12-21 |
| Application Number | CN201210564716.5 |
| Document Type | 专利 |
| Identifier | http://ir.semi.ac.cn/handle/172111/25172 |
| Collection | 中科院半导体材料科学重点实验室 |
| Recommended Citation GB/T 7714 | 刘京明,赵有文,王凤华,等. 降低衬底表面残留杂质浓度的方法. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 降低衬底表面残留杂质浓度的方法.pdf（553KB） | 限制开放 | License | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment