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Fabrication and characterization of an SOI MEMS gyroscope
Zhong Weiwei; Han Guowei; Si Chaowei; Ning Jin; Yang Fuhua
2013
Source PublicationJournal of Semiconductors
Volume34Issue:6Pages:064004
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2014-05-16
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24981
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Zhong Weiwei,Han Guowei,Si Chaowei,et al. Fabrication and characterization of an SOI MEMS gyroscope[J]. Journal of Semiconductors,2013,34(6):064004.
APA Zhong Weiwei,Han Guowei,Si Chaowei,Ning Jin,&Yang Fuhua.(2013).Fabrication and characterization of an SOI MEMS gyroscope.Journal of Semiconductors,34(6),064004.
MLA Zhong Weiwei,et al."Fabrication and characterization of an SOI MEMS gyroscope".Journal of Semiconductors 34.6(2013):064004.
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