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Control of Arsenic Pollution from Waste Gases during Fabrication of Semconductor
Wen Ruimei, Liang junwu,et al
1994
Source PublicationJournal of Environmental Sciences
Volume6Issue:1Pages:123-127
Date Available2014-05-16
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24974
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
Wen Ruimei, Liang junwu,et al. Control of Arsenic Pollution from Waste Gases during Fabrication of Semconductor[J]. Journal of Environmental Sciences,1994,6(1):123-127.
APA Wen Ruimei, Liang junwu,et al.(1994).Control of Arsenic Pollution from Waste Gases during Fabrication of Semconductor.Journal of Environmental Sciences,6(1),123-127.
MLA Wen Ruimei, Liang junwu,et al."Control of Arsenic Pollution from Waste Gases during Fabrication of Semconductor".Journal of Environmental Sciences 6.1(1994):123-127.
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