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MOVPE生长Ga（CH3）3-AsH3-H2体系中砷的形态转化及砷的治理
闻瑞梅,梁骏吾
1997
Source Publication电子学报
Volume25Issue:2Pages:76-78
Subject Area光电子学
Date Available2014-05-15
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24961
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 闻瑞梅,梁骏吾. MOVPE生长Ga（CH3）3-AsH3-H2体系中砷的形态转化及砷的治理[J]. 电子学报,1997,25(2):76-78.
APA 闻瑞梅,梁骏吾.(1997).MOVPE生长Ga（CH3）3-AsH3-H2体系中砷的形态转化及砷的治理.电子学报,25(2),76-78.
MLA 闻瑞梅,梁骏吾."MOVPE生长Ga（CH3）3-AsH3-H2体系中砷的形态转化及砷的治理".电子学报 25.2(1997):76-78.
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