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半导体材料与器件生产工艺尾气中砷,磷,硫的治理及检查测 | |
闻瑞梅,梁骏吾,邓礼生,彭永清 | |
1995 | |
Source Publication | 半导体学报
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Volume | 16Issue:3Pages:188-194 |
Subject Area | 光电子学 |
Date Available | 2014-05-14 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/24957 |
Collection | 中国科学院半导体研究所(2009年前) |
Recommended Citation GB/T 7714 | 闻瑞梅,梁骏吾,邓礼生,彭永清. 半导体材料与器件生产工艺尾气中砷,磷,硫的治理及检查测[J]. 半导体学报,1995,16(3):188-194. |
APA | 闻瑞梅,梁骏吾,邓礼生,彭永清.(1995).半导体材料与器件生产工艺尾气中砷,磷,硫的治理及检查测.半导体学报,16(3),188-194. |
MLA | 闻瑞梅,梁骏吾,邓礼生,彭永清."半导体材料与器件生产工艺尾气中砷,磷,硫的治理及检查测".半导体学报 16.3(1995):188-194. |
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半导体材料与器件生产工艺尾气中.pdf(329KB) | 限制开放 | License | Application Full Text |
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