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半导体材料与器件生产工艺尾气中砷，磷，硫的治理及检查测
闻瑞梅,梁骏吾,邓礼生,彭永清
1995
Source Publication半导体学报
Volume16Issue:3Pages:188-194
Subject Area光电子学
Date Available2014-05-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24957
Collection中国科学院半导体研究所（2009年前）
Recommended Citation
GB/T 7714		 闻瑞梅,梁骏吾,邓礼生,彭永清. 半导体材料与器件生产工艺尾气中砷，磷，硫的治理及检查测[J]. 半导体学报,1995,16(3):188-194.
APA 闻瑞梅,梁骏吾,邓礼生,彭永清.(1995).半导体材料与器件生产工艺尾气中砷，磷，硫的治理及检查测.半导体学报,16(3),188-194.
MLA 闻瑞梅,梁骏吾,邓礼生,彭永清."半导体材料与器件生产工艺尾气中砷，磷，硫的治理及检查测".半导体学报 16.3(1995):188-194.
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