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Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor
Xu Mao; Zhiqiang Fang; Zhe Zhang; Jinling Yan; Zhimei Qi; Fuhua Yang
2013
Source PublicationNano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
Pages244-247
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2014-05-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24919
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xu Mao,Zhiqiang Fang,Zhe Zhang,et al. Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor[J]. Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on,2013:244-247.
APA Xu Mao,Zhiqiang Fang,Zhe Zhang,Jinling Yan,Zhimei Qi,&Fuhua Yang.(2013).Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor.Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on,244-247.
MLA Xu Mao,et al."Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor".Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on (2013):244-247.
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