| Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor | |
| Xu Mao; Zhiqiang Fang; Zhe Zhang; Jinling Yan; Zhimei Qi; Fuhua Yang | |
| 2013 | |
| Source Publication | Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on
 |
| Pages | 244-247 |
| Subject Area | 微电子学 |
| Indexed By | EI |
| Language | 英语 |
| Date Available | 2014-05-08 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/24919 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Xu Mao,Zhiqiang Fang,Zhe Zhang,et al. Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor[J]. Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on,2013:244-247. |
| APA | Xu Mao,Zhiqiang Fang,Zhe Zhang,Jinling Yan,Zhimei Qi,&Fuhua Yang.(2013).Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor.Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on,244-247. |
| MLA | Xu Mao,et al."Sn-rich Au-Sn hermetic packaging at wafer level and its application in SPR sensor".Nano/Micro Engineered and Molecular Systems (NEMS), 2013 8th IEEE International Conference on (2013):244-247. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| Sn-rich Au-Sn hermet（1326KB） | 限制开放 | License | Application Full Text | |||
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