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Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram
Han, Guowei; Si, Chaowei; Ning, Jing; Zhao, Yongmei; Sun, Guosheng; Yang, Fuhua
2013
Source PublicationAdvanced Materials Research
Volume677Pages:74-78
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2014-05-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24886
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Han, Guowei,Si, Chaowei,Ning, Jing,et al. Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram[J]. Advanced Materials Research,2013,677:74-78.
APA Han, Guowei,Si, Chaowei,Ning, Jing,Zhao, Yongmei,Sun, Guosheng,&Yang, Fuhua.(2013).Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram.Advanced Materials Research,677,74-78.
MLA Han, Guowei,et al."Optimization for MEMS filter to reduce feed-through and an analysis method based on polar diagram".Advanced Materials Research 677(2013):74-78.
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