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Low temperature Sn-rich Au - Sn wafer-level bonding
Zhiqiang, Fang; Xu, Mao; Jinling, Yang; Fuhua, Yang
2013
Source PublicationJournal of Semiconductors
Volume34Issue:10Pages:106001
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2014-05-08
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24876
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Zhiqiang, Fang,Xu, Mao,Jinling, Yang,et al. Low temperature Sn-rich Au - Sn wafer-level bonding[J]. Journal of Semiconductors,2013,34(10):106001.
APA Zhiqiang, Fang,Xu, Mao,Jinling, Yang,&Fuhua, Yang.(2013).Low temperature Sn-rich Au - Sn wafer-level bonding.Journal of Semiconductors,34(10),106001.
MLA Zhiqiang, Fang,et al."Low temperature Sn-rich Au - Sn wafer-level bonding".Journal of Semiconductors 34.10(2013):106001.
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