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Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching
Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen
2013
Source PublicationNanotechnology
Volume24Issue:33Pages:335301
Subject Area半导体器件
Indexed BySCI
Language英语
Date Available2014-04-09
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24789
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen. Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching[J]. Nanotechnology,2013,24(33):335301.
APA Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen.(2013).Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching.Nanotechnology,24(33),335301.
MLA Chong Geng, Lu Zheng, Huajing Fang, Qingfeng Yan, Tongbo Wei, Zhibiao Hao, Xiaoqing Wang and Dezhong Shen."Fabrication of volcano-shaped nano-patterned sapphire substrates using colloidal self-assembly and wet chemical etching".Nanotechnology 24.33(2013):335301.
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