SEMI OpenIR  > 中科院半导体照明研发中心
Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars
Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang
2013
Source PublicationJournal of Crystal Growth
Volume386Pages:175–178
Subject Area半导体器件
Indexed BySCI
Language英语
Date Available2014-04-09
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24772
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang. Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars[J]. Journal of Crystal Growth,2013,386:175–178.
APA Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang.(2013).Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars.Journal of Crystal Growth,386,175–178.
MLA Junjie Kang, Zhi Li, Zhiqiang Liu, Hongjian Li, Yongbing Zhao, Yingdong Tian, Ping Ma, Xiaoyan Yi, Guohong Wang."Investigation of the wet-etching mechanism of Ga-polar AlGaNGaN micro-pillars".Journal of Crystal Growth 386(2013):175–178.
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