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Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope
Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang
2013
Source PublicationSENSORS
Volume13Issue:8Pages:10550-10560
Subject Area微电子学
Indexed BySCI
Language英语
Date Available2014-04-09
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24729
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang. Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope[J]. SENSORS,2013,13(8):10550-10560.
APA Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang.(2013).Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope.SENSORS,13(8),10550-10560.
MLA Chaowei Si, Guowei Han, Jin Ning and Fuhua Yang."Bandwidth Optimization Design of a Multi Degree of Freedom MEMS Gyroscope".SENSORS 13.8(2013):10550-10560.
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