SEMI OpenIR  > 中科院半导体材料科学重点实验室
Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O
Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng
2013
Source PublicationJ. Phys. Chem. C
Volume117Pages:24579–24585
Subject Area半导体材料
Indexed BySCI
Language英语
Date Available2014-03-19
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24556
Collection中科院半导体材料科学重点实验室
Recommended Citation
GB/T 7714
Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng. Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O[J]. J. Phys. Chem. C,2013,117:24579–24585.
APA Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng.(2013).Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O.J. Phys. Chem. C,117,24579–24585.
MLA Feng Zhang , Guosheng Sun , Wanshun Zhao , Lei Wang , Liu Zheng , Shengbei Liu , Bin Liu , Lin Dong , Xingfang Liu , Guoguo Yan , Lixin Tian , and Yiping Zeng."Atomic Layer Deposition of BiFeO3 Thin Films Using β_ Diketonates and H2O".J. Phys. Chem. C 117(2013):24579–24585.
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