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Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique
Chen, Yuanfang; Pei, Weihua; Tang, Rongyu; Chen, Sanyuan; Chen, Hongda
2013
Source PublicationSENSORS AND ACTUATORS A-PHYSICAL
Volume189Pages:143-150
Subject Area光电子学
Indexed BySCI
Language英语
Date Available2013-09-22
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24398
Collection集成光电子学国家重点实验室
Recommended Citation
GB/T 7714
Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,et al. Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique[J]. SENSORS AND ACTUATORS A-PHYSICAL,2013,189:143-150.
APA Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,Chen, Sanyuan,&Chen, Hongda.(2013).Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique.SENSORS AND ACTUATORS A-PHYSICAL,189,143-150.
MLA Chen, Yuanfang,et al."Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique".SENSORS AND ACTUATORS A-PHYSICAL 189(2013):143-150.
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