| Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique | |
| Chen, Yuanfang; Pei, Weihua; Tang, Rongyu; Chen, Sanyuan; Chen, Hongda | |
| 2013 | |
| Source Publication | SENSORS AND ACTUATORS A-PHYSICAL
 |
| Volume | 189Pages:143-150 |
| Subject Area | 光电子学 |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2013-09-22 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/24398 |
| Collection | 集成光电子学国家重点实验室 |
| Recommended Citation GB/T 7714 | Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,et al. Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique[J]. SENSORS AND ACTUATORS A-PHYSICAL,2013,189:143-150. |
| APA | Chen, Yuanfang,Pei, Weihua,Tang, Rongyu,Chen, Sanyuan,&Chen, Hongda.(2013).Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique.SENSORS AND ACTUATORS A-PHYSICAL,189,143-150. |
| MLA | Chen, Yuanfang,et al."Conformal coating of parylene for surface anti-adhesion in polydimethylsiloxane (PDMS) double casting technique".SENSORS AND ACTUATORS A-PHYSICAL 189(2013):143-150. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 2013156.pdf（1473KB） | 限制开放 | License | Application Full Text | |||
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