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紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜的制备与研究
李志成,刘斌,张荣,张曌,陶涛,谢自力,陈鹏,江若琏,郑有炓,姬小利
2012
Source Publication物理学报
Volume61Issue:8Pages:087802-1-087802-6
Subject Area光电子学
Indexed ByCSCD
Language中文
Date Available2013-05-29
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24114
Collection中科院半导体照明研发中心
Recommended Citation
GB/T 7714
李志成,刘斌,张荣,张曌,陶涛,谢自力,陈鹏,江若琏,郑有炓,姬小利. 紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜的制备与研究[J]. 物理学报,2012,61(8):087802-1-087802-6.
APA 李志成,刘斌,张荣,张曌,陶涛,谢自力,陈鹏,江若琏,郑有炓,姬小利.(2012).紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜的制备与研究.物理学报,61(8),087802-1-087802-6.
MLA 李志成,刘斌,张荣,张曌,陶涛,谢自力,陈鹏,江若琏,郑有炓,姬小利."紫外波段SiO_2/Si_3N_4介质膜分布式布拉格反射镜的制备与研究".物理学报 61.8(2012):087802-1-087802-6.
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