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Development of sandwich structure micropump with check microvalve based on MEMS technology
Geng, Zhao-Xin; Xing, Bing-Bing; Ding, Ren-Wei
2012
Source PublicationNami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering
Volume10Issue:2Pages:113-119
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2013-05-07
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/24045
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Geng, Zhao-Xin,Xing, Bing-Bing,Ding, Ren-Wei. Development of sandwich structure micropump with check microvalve based on MEMS technology[J]. Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,2012,10(2):113-119.
APA Geng, Zhao-Xin,Xing, Bing-Bing,&Ding, Ren-Wei.(2012).Development of sandwich structure micropump with check microvalve based on MEMS technology.Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering,10(2),113-119.
MLA Geng, Zhao-Xin,et al."Development of sandwich structure micropump with check microvalve based on MEMS technology".Nami Jishu yu Jingmi Gongcheng/Nanotechnology and Precision Engineering 10.2(2012):113-119.
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