SEMI OpenIR  > 半导体集成技术工程研究中心
Improvement of fabrication and characterization methods for micromechanical disk resonators
Zhao H (Zhao Hui); Luo W (Luo Wei); Zheng HY (Zheng Hai-Yang); Yang JL (Yang Jin-Ling); Yang FH (Yang Fu-Hua)
2012
Source PublicationCHINESE PHYSICS B
Volume21Issue:10Pages:100702
Subject Area半导体器件
Indexed BySCI
Language英语
Date Available2013-03-26
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23789
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Zhao H ,Luo W ,Zheng HY ,et al. Improvement of fabrication and characterization methods for micromechanical disk resonators[J]. CHINESE PHYSICS B,2012,21(10):100702.
APA Zhao H ,Luo W ,Zheng HY ,Yang JL ,&Yang FH .(2012).Improvement of fabrication and characterization methods for micromechanical disk resonators.CHINESE PHYSICS B,21(10),100702.
MLA Zhao H ,et al."Improvement of fabrication and characterization methods for micromechanical disk resonators".CHINESE PHYSICS B 21.10(2012):100702.
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