SEMI OpenIR  > 半导体超晶格国家重点实验室
Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application
Shi YB (Shi, Yunbo); Guo H (Guo, Hao); Ni HQ (Ni, Haiqiao); Xue CY (Xue, Chenyang); Niu ZC (Niu, Zhichuan); Tang J (Tang, Jun); Liu J (Liu, Jun); Zhang WD (Zhang, Wendong); He JF (He, Jifang); Li MF (Li, Mifeng); Yu Y (Yu, Ying)
2012
Source PublicationMATERIALS
Volume5Issue:12Pages:2917-2926
Subject Area半导体物理
Indexed BySCI
Language英语
Date Available2013-03-26
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23768
Collection半导体超晶格国家重点实验室
Recommended Citation
GB/T 7714
Shi YB ,Guo H ,Ni HQ ,et al. Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application[J]. MATERIALS,2012,5(12):2917-2926.
APA Shi YB .,Guo H .,Ni HQ .,Xue CY .,Niu ZC .,...&Yu Y .(2012).Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application.MATERIALS,5(12),2917-2926.
MLA Shi YB ,et al."Optimization of the GaAs-on-Si Substrate for Microelectromechanical Systems (MEMS) Sensor Application".MATERIALS 5.12(2012):2917-2926.
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