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An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices
Liu, YF; Xie, J; Zhao, H; Luo, W; Yang, JL; An, J; Yang, FH
2012
Source PublicationJOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume22Issue:3Pages:35003
Subject Area半导体材料
Indexed BySCI
Language英语
Date Available2013-03-20
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23744
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Liu, YF,Xie, J,Zhao, H,et al. An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING,2012,22(3):35003.
APA Liu, YF.,Xie, J.,Zhao, H.,Luo, W.,Yang, JL.,...&Yang, FH.(2012).An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices.JOURNAL OF MICROMECHANICS AND MICROENGINEERING,22(3),35003.
MLA Liu, YF,et al."An effective approach for restraining electrochemical corrosion of polycrystalline silicon caused by an HF-based solution and its application for mass production of MEMS devices".JOURNAL OF MICROMECHANICS AND MICROENGINEERING 22.3(2012):35003.
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