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Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates
Song, Binbin; Wu, Ping; Chen, Sen; Zhang, Shiping; Yan, Dan; Xue, Lian; Wu, P.(pingwu@sas.ustb.edu.cn)
2011
Source PublicationSurface and Interface Analysis
ISSN01422421
AbstractAl2O3, Al2O3/Al and Al2O3-Al graded coatings were fabricated on China low activation martensitic steel and silicon substrates by RF magnetron sputtering. The coating composition and cross-section morphologies were investigated using X-ray photoelectron spectroscopy, Auger electron spectroscopy and field-emission scanning electron microscopy. The mechanical properties of the coatings were studied using nanoindentation, wafer-curvature measurements and microscratch tests. The results show that usable Al2O3-Al graded coatings could be fabricated. With a more continuous compositional gradient, the interface zone was more compact. The hardness and elastic modulus of Al2O3-Al graded coatings were less than those of Al2O3 coatings, but greater than those of Al2O3/Al coatings. After annealing at773K for3h, the hardness of Al2O3-Al graded coating showed a small increase. The residual stresses in Al2O3-Al graded coatings declined to about0.3GPa, compared with the6.6GPa for Al2O3 coating. The adhesion of Al2O3 was improved by deposition of Al or Al compositional gradient oxide layers.?2011 John Wiley& Sons, Ltd.
metadata_83中科院半导体照明研发中心
KeywordAdhesion Auger Electron Spectroscopy Fabrication Hardness Magnetron Sputtering Martensitic Steel Morphology Nanoindentation Protective Coatings Scanning Electron Microscopy Silicon Wafers x Ray Photoelectron Spectroscopy
Subject Area半导体材料
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23142
Collection中科院半导体照明研发中心
Corresponding AuthorWu, P.(pingwu@sas.ustb.edu.cn)
Recommended Citation
GB/T 7714
Song, Binbin,Wu, Ping,Chen, Sen,et al. Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates[J]. Surface and Interface Analysis,2011.
APA Song, Binbin.,Wu, Ping.,Chen, Sen.,Zhang, Shiping.,Yan, Dan.,...&Wu, P..(2011).Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates.Surface and Interface Analysis.
MLA Song, Binbin,et al."Fabrication, morphology and mechanical properties of Al2O3-Al graded coatings on China low activation martensitic steel substrates".Surface and Interface Analysis (2011).
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