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Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells
Liu, Shi-Yong; Zeng, Xiang-Bo; Peng, Wen-Bo; Yao, Wen-Jie; Xie, Xiao-Bing; Yang, Ping; Wang, Chao; Wang, Zhan-Guo; Zeng, X.-B.(xbzeng@semi.ac.cn)
2011
Source PublicationCailiao Gongcheng/Journal of Materials Engineering
ISSN10014381
Issue8Pages:5-7+13
AbstractThe plasma enhanced chemical vapor deposition(PECVD) system was used for fabricating the silicon films with different hydrogen dilution ratio(RH) under the high power density, high pressure and low substrate temperature. High-resolution transmission electron microscopy(HRTEM) and Raman spectroscopy indicated that the thin films were nanocrystalline silicon(nc-Si) films which contained nanocrystallites with grain size around3-5 nm. The effects of the RH on the optical band gaps of the nc-Si thin films were studied. The results showed that the optical band gaps of the nc-Si thin films increased with the increased in the RH. An double nc-Si p-layers structure was developed to improve the i/p interface in hydrogenated amorphous silicon(a-Si:H) solar cells. The efficiency of the double nc-Si p-layers cell was improved by17% compared its counterpart of the single nc-Si p-layer cell.
metadata_83中科院半导体材料科学重点实验室
KeywordAmorphous Films Chemical Vapor Deposition Energy Gap High Resolution Electron Microscopy High Resolution Transmission Electron Microscopy Hydrogen Nanocrystalline Silicon Optical Band Gaps Plasma Deposition Plasma Enhanced Chemical Vapor Deposition Raman Spectroscopy Semiconducting Silicon Compounds Solar Power Generation Thin Films Transmission Electron Microscopy
Subject Area半导体材料
Indexed ByEI
Language中文
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23134
Collection中科院半导体材料科学重点实验室
Corresponding AuthorZeng, X.-B.(xbzeng@semi.ac.cn)
Recommended Citation
GB/T 7714
Liu, Shi-Yong,Zeng, Xiang-Bo,Peng, Wen-Bo,et al. Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells[J]. Cailiao Gongcheng/Journal of Materials Engineering,2011(8):5-7+13.
APA Liu, Shi-Yong.,Zeng, Xiang-Bo.,Peng, Wen-Bo.,Yao, Wen-Jie.,Xie, Xiao-Bing.,...&Zeng, X.-B..(2011).Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells.Cailiao Gongcheng/Journal of Materials Engineering(8),5-7+13.
MLA Liu, Shi-Yong,et al."Optimization of double nanocrystalline silicon p-layers for amorphous silicon solar cells".Cailiao Gongcheng/Journal of Materials Engineering .8(2011):5-7+13.
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