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Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant
Qiu, Yingping; Wang, Yang; Shao, Yongbo; Zhou, Daibing; Liang, Song; Zhao, Lingjuan; Wang, Wei; Qiu, Y.(ypqiu@semi.ac.cn)
2011
Source PublicationJournal of Semiconductors
ISSN16744926
Volume32Issue:10Pages:105002
AbstractA novel lumped electro-absorption modulator with a charge layer and an undercut ridge waveguide(DU-EAM) was fabricated and measured. Also, two other kinds of EAM with straight ridge waveguides, one with a charge layer(D-EAM) and another with no charge layer(N-EAM), were fabricated and tested to ensure that the design of the DU-EAM would reduce the RC-time constant. The measured capacitance of the D-EAM and the DU-EAM is lower than that of the N-EAM under reverse bias voltage from-1 to-8 V due to the inserted charge layer. The capacitances of the N-EAM, the D-EAM and the DU-EAM are0.375,0.225 and0.325 pF, respectively, at-3 V. In addition, the DU-EAM had a larger extinction ratio(25 dB at-3 V) and higher modulation efficiency(13 dB/V between-1 and-2 V) than two other straight-ridge-waveguide ones(the D-EAM performed22 dB and10 dB/V, the N-EAM performed20 dB and10 dB/V) due to the5.2μm wider active region.?2011 Chinese Institute of Electronics.
metadata_83中科院半导体材料科学重点实验室
KeywordAbsorption Capacitance Fabrication Light Extinction Semiconducting Indium Gallium Arsenide Waveguides
Subject Area半导体材料
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23127
Collection中科院半导体材料科学重点实验室
Corresponding AuthorQiu, Y.(ypqiu@semi.ac.cn)
Recommended Citation
GB/T 7714
Qiu, Yingping,Wang, Yang,Shao, Yongbo,et al. Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant[J]. Journal of Semiconductors,2011,32(10):105002.
APA Qiu, Yingping.,Wang, Yang.,Shao, Yongbo.,Zhou, Daibing.,Liang, Song.,...&Qiu, Y..(2011).Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant.Journal of Semiconductors,32(10),105002.
MLA Qiu, Yingping,et al."Fabrication of a novel lumped electro-absorption modulator with a lower RC-time constant".Journal of Semiconductors 32.10(2011):105002.
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