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Tunable filters based on an SOI nano-wire waveguide micro ring resonator
Li, Shuai; Wu, Yuanda; Yin, Xiaojie; An, Junming; Li, Jianguang; Wang, Hongjie; Hu, Xiongwei; Li, S.(lshsemi@semi.ac.cn)
2011
Source PublicationJournal of Semiconductors
ISSN16744926
Volume32Issue:8Pages:84007
AbstractMicro ring resonator(MRR) filters based on a silicon on insulator(SOI) nanowire waveguide are fabricated by electron beam photolithography(EBL) and inductive coupled plasma(ICP) etching technology. The cross-section size of the strip waveguides is450×220 nm2, and the bending radius of the micro ring is around5μm. The test results from the tunable filter based on a single ring show that the free spectral range(FSR) is16.8 nm and the extinction ratio(ER) around the wavelength1550 nm is18.1 dB. After thermal tuning, the filter's tuning bandwidth reaches4.8 nm with a tuning efficiency of0.12 nm/°C Meanwhile, we fabricated and studied multi-channel filters based on a single ring and a double ring. After measurement, we drew the following conclusions: during the signal transmission of multi-channel filters, crosstalk exists mainly among different transmission channels and are fairly distinct when there are signals input to add ports.?2011 Chinese Institute of Electronics.
metadata_83光电子研究发展中心
KeywordCrosstalk Electron Beams Nanowires Optical Resonators Photolithography Tuning Waveguides
Subject Area光电子学
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23105
Collection光电子研究发展中心
Corresponding AuthorLi, S.(lshsemi@semi.ac.cn)
Recommended Citation
GB/T 7714
Li, Shuai,Wu, Yuanda,Yin, Xiaojie,et al. Tunable filters based on an SOI nano-wire waveguide micro ring resonator[J]. Journal of Semiconductors,2011,32(8):84007.
APA Li, Shuai.,Wu, Yuanda.,Yin, Xiaojie.,An, Junming.,Li, Jianguang.,...&Li, S..(2011).Tunable filters based on an SOI nano-wire waveguide micro ring resonator.Journal of Semiconductors,32(8),84007.
MLA Li, Shuai,et al."Tunable filters based on an SOI nano-wire waveguide micro ring resonator".Journal of Semiconductors 32.8(2011):84007.
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