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Low-voltage, high extinction ratio carrier-depletion Mach-Zehnder silicon optical modulator
Ding, Jianfeng; Chen, Hongtao; Ji, Ruiqiang; Yang, Lin; Tian, Yonghui; Zhang, Lei; Zhu, Weiwei; Lu, Yangyang; Min, Rui; Zhou, Ping; Yang, L.(oip@semi.ac.cn)
2011
Source PublicationProceedings of SPIE- The International Society for Optical Engineering
ISSN0277786X
Volume8308Pages:83081P
AbstractAs a result of the low modulation efficiency of carrier-depletion Mach-Zehnder silicon optical modulator, it always needs a high voltage around6 V, which is very difficult to supply in an integrated high-speed CMOS chip. We demonstrate a carrier-depletion Mach-Zehnder silicon optical modulator which works at a low voltage. Its coplanar waveguide electrode is carefully designed to make sure the electrical wave loss along the device is low. The device operates well at a data rate of12.5 Gb/s, whose phase-shifter length is2 mm. Voltages with the swinging amplitudes being1 V and2 V are applied to the device with the reverse bias voltages of0.5 V and0.8 V. The extinction ratios are7.67 and12.79 dB respectively.?2011 SPIE-OSA-IEEE.
metadata_83光电系统实验室
KeywordCoplanar Waveguides Light Extinction Light Modulation Optoelectronic Devices Silicon
Subject Area光电子学
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23085
Collection光电系统实验室
Corresponding AuthorYang, L.(oip@semi.ac.cn)
Recommended Citation
GB/T 7714
Ding, Jianfeng,Chen, Hongtao,Ji, Ruiqiang,et al. Low-voltage, high extinction ratio carrier-depletion Mach-Zehnder silicon optical modulator[J]. Proceedings of SPIE- The International Society for Optical Engineering,2011,8308:83081P.
APA Ding, Jianfeng.,Chen, Hongtao.,Ji, Ruiqiang.,Yang, Lin.,Tian, Yonghui.,...&Yang, L..(2011).Low-voltage, high extinction ratio carrier-depletion Mach-Zehnder silicon optical modulator.Proceedings of SPIE- The International Society for Optical Engineering,8308,83081P.
MLA Ding, Jianfeng,et al."Low-voltage, high extinction ratio carrier-depletion Mach-Zehnder silicon optical modulator".Proceedings of SPIE- The International Society for Optical Engineering 8308(2011):83081P.
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