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Fabrication and characterisation of polysilicon-based clamped-clamped filter
Zhao, Yongmei; Ning, Jin; Han, Guowei; Si, Chaowei; Zhao, Y.(ymzhao@semi.ac.cn)
2011
Source PublicationKey Engineering Materials
ISSN10139826
Volume483Pages:112-116
AbstractThe rapid growth of micromaching technology makes the miniaturized or integrated MEMS resonator or filter become possible. This paper reports on the fabrication and characterization of the polysilicon-based RF MEMS filter, comprised of the two clamped-clamped resonators coupled with the micro dimensions beam. The surface micromaching technology has been adopted to fabricate the clamped-clamped filter. The fabricating process and the optimization of the typical micromaching process for the MEMS RF filter are illustrated in detail. After the fabrication, the resonating characteristics are measured. The center frequency of30 MHz of the micromechanical bandpass filter is demonstrated.?(2011) Trans Tech Publications.
metadata_83半导体集成技术工程研究中心
KeywordElectromechanical Filters Fabrication Microelectromechanical Devices Nanotechnology Polysilicon Resonators Technology
Subject Area微电子学
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23067
Collection半导体集成技术工程研究中心
Corresponding AuthorZhao, Y.(ymzhao@semi.ac.cn)
Recommended Citation
GB/T 7714
Zhao, Yongmei,Ning, Jin,Han, Guowei,et al. Fabrication and characterisation of polysilicon-based clamped-clamped filter[J]. Key Engineering Materials,2011,483:112-116.
APA Zhao, Yongmei,Ning, Jin,Han, Guowei,Si, Chaowei,&Zhao, Y..(2011).Fabrication and characterisation of polysilicon-based clamped-clamped filter.Key Engineering Materials,483,112-116.
MLA Zhao, Yongmei,et al."Fabrication and characterisation of polysilicon-based clamped-clamped filter".Key Engineering Materials 483(2011):112-116.
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