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Sensitive detection of infrared photons using a high-Q microcantilever
Zhang, Fengxin; Zhu, Yinfang; Yang, Jinling; Cao, Lixin; Yang, J.(jlyang@semi.ac.cn)
2011
Source PublicationJournal of Semiconductors
ISSN16744926
Volume32Issue:9Pages:94010
AbstractA new approach based on microcantilevers is presented to detect infrared photons with high sensitivity. Infrared photons are measured by monitoring the amplitude change of a vibrating microcantilever under light pressure force. The irradiating light is modulated into sinusoidal and pulsed waves, and to be in-phase and anti-phase with the cantilever driving signal. A linear relationship between the amplitude change of the cantilever and the light power distributing on the cantilever was observed. Under a vacuum of10-4 Pa, an infrared light power of7.4 nW was detected with the cantilever. The in-phase and anti-phase modulation to the cantilever vibration using a pulsed light results in an enhanced response of the cantilever.?2011 Chinese Institute of Electronics.
metadata_83半导体集成技术工程研究中心
KeywordChemical Sensors Composite Micromechanics Drag Reduction Nanocantilevers Phase Modulation Photons
Subject Area微电子学
Indexed ByEI
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23065
Collection半导体集成技术工程研究中心
Corresponding AuthorYang, J.(jlyang@semi.ac.cn)
Recommended Citation
GB/T 7714
Zhang, Fengxin,Zhu, Yinfang,Yang, Jinling,et al. Sensitive detection of infrared photons using a high-Q microcantilever[J]. Journal of Semiconductors,2011,32(9):94010.
APA Zhang, Fengxin,Zhu, Yinfang,Yang, Jinling,Cao, Lixin,&Yang, J..(2011).Sensitive detection of infrared photons using a high-Q microcantilever.Journal of Semiconductors,32(9),94010.
MLA Zhang, Fengxin,et al."Sensitive detection of infrared photons using a high-Q microcantilever".Journal of Semiconductors 32.9(2011):94010.
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