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Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering
Liang, Ji-Ran; Hu, Ming; Liang, Xiu-Qin; Kan, Qiang; Chen, Tao; Chen, Hong-Da; Liang, J.-R.(ljiranbo@yahoo.com.cn)
2011
Source PublicationTianjin Daxue Xuebao(Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology
ISSN04932137
Volume44Issue:10Pages:847-851
AbstractVanadium dioxide thin films were fabricated by RF magnetron sputtering and annealing in nitrogen. The effects of sputtering power on resistance-temperature property were investigated. X-ray diffraction(XRD) and X-ray photoelectron spectroscopy(XPS) were employed to study and analyze the structure of crystalline units and the phase composition of the thin films. The resistance-temperature property was also measured by using of four point probe technology. The results show that the sheet-resistance of vanadium oxide thin films decreased as the sputtering power increased if the oxygen partial pressure and annealing technology kept constant; after annealing at450°C, the vanadium oxide thin film showed obvious semiconductor-metal phase transition, and the order of magnitude of phase transition decreased as the sputtering power increased; the magnitude of phase transition was close to3 when the sputtering power was150 W.
metadata_83半导体集成技术工程研究中心
KeywordAnnealing Magnetron Sputtering Oxide Films Oxides Photoelectron Spectroscopy Thin Films Vanadium Vanadium Alloys Vanadium Compounds x Ray Diffraction x Ray Diffraction Analysis x Ray Photoelectron Spectroscopy
Subject Area微电子学
Indexed ByEI
Language中文
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23063
Collection半导体集成技术工程研究中心
Corresponding AuthorLiang, J.-R.(ljiranbo@yahoo.com.cn)
Recommended Citation
GB/T 7714
Liang, Ji-Ran,Hu, Ming,Liang, Xiu-Qin,et al. Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering[J]. Tianjin Daxue Xuebao(Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology,2011,44(10):847-851.
APA Liang, Ji-Ran.,Hu, Ming.,Liang, Xiu-Qin.,Kan, Qiang.,Chen, Tao.,...&Liang, J.-R..(2011).Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering.Tianjin Daxue Xuebao(Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology,44(10),847-851.
MLA Liang, Ji-Ran,et al."Effects of sputtering power on phase transition of vanadium oxide thin film by radio frequency magnetron sputtering".Tianjin Daxue Xuebao(Ziran Kexue yu Gongcheng Jishu Ban)/Journal of Tianjin University Science and Technology 44.10(2011):847-851.
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