SEMI OpenIR  > 半导体材料科学中心
High-quality homoepitaxial layers grown on4H-SiC at a high growth rate by vertical LPCVD
Wu, Hailei; Sun, Guosheng; Yang, Ting; Yan, Guoguo; Wang, Lei; Zhao, Wanshun; Liu, Xingfang; Zeng, Yiping; Wen, Jialiang; Wu, H.(hlwu@semi.ac.cn)
2011
Source PublicationJournal of Semiconductors
ISSN16744926
Volume32Issue:4Pages:43005
AbstractHigh quality, homoepitaxial layers of4H-SiC were grown on off-oriented4H-SiC(0001) Si planes in a vertical low-pressure hot-wall CVD system(LPCVD) by using trichlorosilane(TCS) as a silicon precursor source together with ethylene(C2H4) as a carbon precursor source. The growth rate of25-30μm/h has been achieved at lower temperatures between1500 and1530°C. The surface roughness and crystalline quality of50μm thick epitaxial layers(grown for2 h) did not deteriorate compared with the corresponding results of thinner layers(grown for30 min). The background doping concentration was reduced to2.13×1015× cm-3. The effect of the C/Si ratio in the gas phase on growth rate and quality of the epi-layers was investigated.?2011 Chinese Institute of Electronics.
metadata_83半导体材料科学中心
KeywordEpitaxial Growth Ethylene Growth Rate Morphology Surface Roughness
Subject Area半导体材料
Indexed ByEI
Language英语
Date Available2012-06-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/23039
Collection半导体材料科学中心
Corresponding AuthorWu, H.(hlwu@semi.ac.cn)
Recommended Citation
GB/T 7714
Wu, Hailei,Sun, Guosheng,Yang, Ting,et al. High-quality homoepitaxial layers grown on4H-SiC at a high growth rate by vertical LPCVD[J]. Journal of Semiconductors,2011,32(4):43005.
APA Wu, Hailei.,Sun, Guosheng.,Yang, Ting.,Yan, Guoguo.,Wang, Lei.,...&Wu, H..(2011).High-quality homoepitaxial layers grown on4H-SiC at a high growth rate by vertical LPCVD.Journal of Semiconductors,32(4),43005.
MLA Wu, Hailei,et al."High-quality homoepitaxial layers grown on4H-SiC at a high growth rate by vertical LPCVD".Journal of Semiconductors 32.4(2011):43005.
Files in This Item:
File Name/Size DocType Version Access License
2012019.pdf(887KB) 限制开放LicenseApplication Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Wu, Hailei]'s Articles
[Sun, Guosheng]'s Articles
[Yang, Ting]'s Articles
Baidu academic
Similar articles in Baidu academic
[Wu, Hailei]'s Articles
[Sun, Guosheng]'s Articles
[Yang, Ting]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Wu, Hailei]'s Articles
[Sun, Guosheng]'s Articles
[Yang, Ting]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.