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Nanoporous thin film based symmetric slab optical waveguide humidity sensor
Yang, Hui-Qi; Lu, Dan-Feng; Qi, Zhi-Mei,; Qi, Z.-M.(zhimei-qi@mail.ie.ac.cn)
2011
Source PublicationGuangdianzi Jiguang/Journal of Optoelectronics Laser
ISSN10050086
Volume22Issue:10Pages:1479-1482
AbstractA novel simple humidity sensor is prepared by using a symmetric slab glass waveguide whose two surfaces are coated with nanoporous TiO2 thin films. The humidity-sensing principle of the device is that the propagation loss of light guided in the waveguide relies on the average refractive index of nanoprous TiO2 film, and the latter is a function of the amount of water adsorbed in the film. Owing to the strong dependence of the amount of adsorbed water on the ambient humidity, the relative humidity(RH) around the sensor can be detected by in situ monitoring the output light intensity of the sensor. The experimental results indicate that at650 nm wavelength a gradual increase of RH from20.47% to84.16% makes the signal attenuatuation nonlinearly increase from0 dB to1.82 dB. The sensor sensitivity is larger at RH>60% than that at RH<60%. The influence of thickness of nanoporous film on the sensor sensitivity and the hysteresis effect of the sensor are preliminarily investigated.
metadata_83集成光电子学国家重点实验室
KeywordHumidity Sensors Light Refraction Light Sources Refractive Index Refractometers Thin Films Titanium Dioxide
Subject Area光电子学
Indexed ByEI
Language中文
Date Available2012-06-13
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22971
Collection集成光电子学国家重点实验室
Corresponding AuthorQi, Z.-M.(zhimei-qi@mail.ie.ac.cn)
Recommended Citation
GB/T 7714
Yang, Hui-Qi,Lu, Dan-Feng,Qi, Zhi-Mei,,et al. Nanoporous thin film based symmetric slab optical waveguide humidity sensor[J]. Guangdianzi Jiguang/Journal of Optoelectronics Laser,2011,22(10):1479-1482.
APA Yang, Hui-Qi,Lu, Dan-Feng,Qi, Zhi-Mei,,&Qi, Z.-M..(2011).Nanoporous thin film based symmetric slab optical waveguide humidity sensor.Guangdianzi Jiguang/Journal of Optoelectronics Laser,22(10),1479-1482.
MLA Yang, Hui-Qi,et al."Nanoporous thin film based symmetric slab optical waveguide humidity sensor".Guangdianzi Jiguang/Journal of Optoelectronics Laser 22.10(2011):1479-1482.
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