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Tunable filter based on silicon-on-insulator microring resonator
Jiang, Hong-Wei; Wu, Yuan-Da; Jiang, H.-W.(luobinbin@cqut.edu.cn)
2011
Source PublicationGuangdianzi Jiguang/Journal of Optoelectronics Laser
ISSN10050086
Volume22Issue:6Pages:813-815
AbstractMicroring-resonator filters are fabricated by E-beam photolithography and inductive-coupled-plasma(ICP) etching technology. The cross-section size of the strip waveguides is300 nm×320 nm, and the bending radius of the microring is5μm.The measured results show that the free spectral range(FSR) and extinction ratio(ER) at the wavelength of1550 nm are16.8 nm and18.1 dB, respectively. After thermo-optic modulation, the tunable filter wavelength range reaches4.8 nm, and the tuning efficiency is0.12 nm/°C.
metadata_83集成光电子学国家重点实验室
KeywordMicrowave Filters Modulation Nanowires Optical Resonators Photolithography Waveguides
Subject Area光电子学
Indexed ByEI
Language中文
Date Available2012-06-13
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22967
Collection集成光电子学国家重点实验室
Corresponding AuthorJiang, H.-W.(luobinbin@cqut.edu.cn)
Recommended Citation
GB/T 7714
Jiang, Hong-Wei,Wu, Yuan-Da,Jiang, H.-W.. Tunable filter based on silicon-on-insulator microring resonator[J]. Guangdianzi Jiguang/Journal of Optoelectronics Laser,2011,22(6):813-815.
APA Jiang, Hong-Wei,Wu, Yuan-Da,&Jiang, H.-W..(2011).Tunable filter based on silicon-on-insulator microring resonator.Guangdianzi Jiguang/Journal of Optoelectronics Laser,22(6),813-815.
MLA Jiang, Hong-Wei,et al."Tunable filter based on silicon-on-insulator microring resonator".Guangdianzi Jiguang/Journal of Optoelectronics Laser 22.6(2011):813-815.
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