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Effects of grain size on resistance and transmittance transition of vanadium oxide thin film
Liang, Ji-Ran; Hu, Ming; Kan, Qiang; Chen, Tao; Liang, Xiu-Qin; Chen, Hong-Da; Liang, J.-R.(liang_jiran@tju.edu.cn)
2011
Source PublicationCailiao Gongcheng/Journal of Materials Engineering
ISSN10014381
Issue4Pages:58-62+74
AbstractVanadium oxide thin films were deposited by reactive direct current facing targets magnetron sputtering, and then annealed in oxygen ambience under different temperature to fabricate phase transition vanadium dioxide thin films with different grain size. The transformation of resistance and transmittance of vanadium oxide thin films were measured across phase transition. The results show that the proportion of VO2 in film is about40%(atom fraction) after annealed in300°C and360°C, the films have insulator-metal phase transition properties. The grain size is50 nm and100 nm, respectively. After annealing at360°C, the surface of vanadium oxide thin film becomes compact and some grain comes to merge. Electrical and optical transition properties across phase transition show that the transition temperature decreases as grain size increasing, however, the temperature width of phase transition keep constant. The temperature width of phase transition obtained from electrical transition properties is about30°C, but that from optical transition properties is only8°C.
metadata_83集成光电子学国家重点实验室
KeywordAnnealing Electric Properties Grain Size And Shape Optical Transitions Oxide Films Oxides Thin Films Vanadium Vanadium Alloys Vanadium Compounds
Subject Area光电子学
Indexed ByEI
Language中文
Date Available2012-06-13
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22956
Collection集成光电子学国家重点实验室
Corresponding AuthorLiang, J.-R.(liang_jiran@tju.edu.cn)
Recommended Citation
GB/T 7714
Liang, Ji-Ran,Hu, Ming,Kan, Qiang,et al. Effects of grain size on resistance and transmittance transition of vanadium oxide thin film[J]. Cailiao Gongcheng/Journal of Materials Engineering,2011(4):58-62+74.
APA Liang, Ji-Ran.,Hu, Ming.,Kan, Qiang.,Chen, Tao.,Liang, Xiu-Qin.,...&Liang, J.-R..(2011).Effects of grain size on resistance and transmittance transition of vanadium oxide thin film.Cailiao Gongcheng/Journal of Materials Engineering(4),58-62+74.
MLA Liang, Ji-Ran,et al."Effects of grain size on resistance and transmittance transition of vanadium oxide thin film".Cailiao Gongcheng/Journal of Materials Engineering .4(2011):58-62+74.
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