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Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities
Zhang, Jiashun; Wang, Yue; Wu, Yuanda; Zhang, Xiaoguang; Jiang, Ting; An, Junming; Li, Jianguang; Wang, Hongjie; Hu, Xiongwei; Wu, Y.(wuyuanda@red.semi.ac.cn)
2011
Source PublicationJournal of Semiconductors
ISSN16744926
Volume32Issue:9Pages:94004
AbstractH5 photonic crystal(PC) microcavities co-implanted with erbium(Er) and oxygen(O) ions were fabricated on silicon-on-insulator(SOI) wafers. Photoluminescence(PL) measurements were taken at room temperature and a light extraction enhancement of up to12 was obtained at1.54μm, as compared to an identically implanted unpatterned SOI wafer. In addition, we also explored the adjustment of cavity modes by changing the structural parameters of the PC, and the measured results showed that the cavity-resonant peaks shifted towards shorter wavelengths as the radius of the air holes increased, which is consistent with the theoretical simulation.?2011 Chinese Institute of Electronics.
metadata_83集成光电子学国家重点实验室
KeywordErbium Microcavities Photoluminescence Photonic Crystals Semiconducting Silicon Compounds Silicon Wafers
Subject Area光电子学
Indexed ByEI
Language英语
Date Available2012-06-13
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22950
Collection集成光电子学国家重点实验室
Corresponding AuthorWu, Y.(wuyuanda@red.semi.ac.cn)
Recommended Citation
GB/T 7714
Zhang, Jiashun,Wang, Yue,Wu, Yuanda,et al. Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities[J]. Journal of Semiconductors,2011,32(9):94004.
APA Zhang, Jiashun.,Wang, Yue.,Wu, Yuanda.,Zhang, Xiaoguang.,Jiang, Ting.,...&Wu, Y..(2011).Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities.Journal of Semiconductors,32(9),94004.
MLA Zhang, Jiashun,et al."Light extraction enhancement of SOI-based erbium/oxygen Co-implanted photonic crystal microcavities".Journal of Semiconductors 32.9(2011):94004.
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