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Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection
Chen X; Fan ZC; Xu Y; Song GF; Chen LH; Chen, X (reprint author), Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China, chenxi@semi.ac.cn; chenlh@semi.ac.cn
2011
Source PublicationMICROELECTRONIC ENGINEERING
ISSN0167-9317
Volume88Issue:9Pages:2889-2893
AbstractWe combine interferometric lithography and inductively coupled plasma etching to fabricate GaAs subwavelength grating (SWG) which mimics the moth eye structures. Through the modification of morphology parameters, including profile, height and packing fraction, tapered, high-aspect-ratio and closely-packed GaAs SWGs are obtained. The measurement of spectral reflectance of the fabricated SWGs shows that reflection has been dramatically reduced compared to the polished GaAs surface. Particularly, the optimized SWG structures exhibit an average reflection below 5% in the wavelengths ranging from 350 to 900 nm. Furthermore, the angular-independent property is demonstrated by measuring the reflectance versus varying angles of incidence at 532 and 632.8 nm wavelengths. (C) 2011 Elsevier B.V. All rights reserved.
metadata_83纳米光电子实验室
KeywordInterference Lithography Photoresist Gratings Profile Light Nanostructures Reflection Reduction Array Si
Subject Area光电子学
Funding OrganizationNational Natural Science Foundation of China[60636030, 60707009, 60906027, 60906028]; Beijing Natural Science Foundation[4112058]
Indexed BySCI
Language英语
Date Available2012-02-06
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22745
Collection纳米光电子实验室
Corresponding AuthorChen, X (reprint author), Chinese Acad Sci, Inst Semicond, Nanooptoelect Lab, Beijing 100083, Peoples R China, chenxi@semi.ac.cn; chenlh@semi.ac.cn
Recommended Citation
GB/T 7714
Chen X,Fan ZC,Xu Y,et al. Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection[J]. MICROELECTRONIC ENGINEERING,2011,88(9):2889-2893.
APA Chen X.,Fan ZC.,Xu Y.,Song GF.,Chen LH.,...&chenlh@semi.ac.cn.(2011).Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection.MICROELECTRONIC ENGINEERING,88(9),2889-2893.
MLA Chen X,et al."Fabrication of biomimic GaAs subwavelength grating structures for broadband and angular-independent antireflection".MICROELECTRONIC ENGINEERING 88.9(2011):2889-2893.
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