A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering | |
Geng ZX; Liu W; Wang XD; Yang FH; Yang, FH (reprint author), Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China, fhyang@semi.ac.cn | |
2011 | |
Source Publication | SENSORS AND ACTUATORS A-PHYSICAL
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ISSN | 0924-4247 |
Volume | 169Issue:1Pages:37-42 |
Abstract | Surface enhanced Raman spectroscopy (SERS) with enormous enhancements has shown great potential in single-molecule detection, however, the fabrication of large-scale and controllable substrates with high SERS activity is a major limitation. To achieve this goal, this paper provides method to fabricate wafer level SERS substrate with tunable nanoparticle sizes and interparticle gaps. The nanoparticle size, density, and shape are found to be dependent on the thickness of Ag film and the condition of annealing. Ag nanoparticles on the silicon substrate were packaged with polydimethylsiloxane (PDMS) microchannel before testing. The results of detections of Rhodamine 6G SERS spectra show that the fabrication protocol of such a SERS substrate is low-cost, easy-fabrication and inexpensive. Therefore, this substrate with Ag nanoparticle array may anticipate a wide range of applications in SERS-based sensors. (C) 2011 Elsevier B.V. All rights reserved. |
metadata_83 | 半导体集成技术工程研究中心 |
Subject Area | 半导体材料 |
Funding Organization | China Postdoctoral Science Foundation[20090460497]; Foundation for the Youth Teacher of MUC[0910KYQN65, 0910KYZY54] |
Indexed By | SCI |
Language | 英语 |
Date Available | 2012-01-06 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/22721 |
Collection | 半导体集成技术工程研究中心 |
Corresponding Author | Yang, FH (reprint author), Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China, fhyang@semi.ac.cn |
Recommended Citation GB/T 7714 | Geng ZX,Liu W,Wang XD,et al. A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering[J]. SENSORS AND ACTUATORS A-PHYSICAL,2011,169(1):37-42. |
APA | Geng ZX,Liu W,Wang XD,Yang FH,&Yang, FH .(2011).A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering.SENSORS AND ACTUATORS A-PHYSICAL,169(1),37-42. |
MLA | Geng ZX,et al."A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering".SENSORS AND ACTUATORS A-PHYSICAL 169.1(2011):37-42. |
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