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A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering
Geng ZX; Liu W; Wang XD; Yang FH; Yang, FH (reprint author), Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China, fhyang@semi.ac.cn
2011
Source PublicationSENSORS AND ACTUATORS A-PHYSICAL
ISSN0924-4247
Volume169Issue:1Pages:37-42
AbstractSurface enhanced Raman spectroscopy (SERS) with enormous enhancements has shown great potential in single-molecule detection, however, the fabrication of large-scale and controllable substrates with high SERS activity is a major limitation. To achieve this goal, this paper provides method to fabricate wafer level SERS substrate with tunable nanoparticle sizes and interparticle gaps. The nanoparticle size, density, and shape are found to be dependent on the thickness of Ag film and the condition of annealing. Ag nanoparticles on the silicon substrate were packaged with polydimethylsiloxane (PDMS) microchannel before testing. The results of detections of Rhodamine 6G SERS spectra show that the fabrication protocol of such a SERS substrate is low-cost, easy-fabrication and inexpensive. Therefore, this substrate with Ag nanoparticle array may anticipate a wide range of applications in SERS-based sensors. (C) 2011 Elsevier B.V. All rights reserved.
metadata_83半导体集成技术工程研究中心
Subject Area半导体材料
Funding OrganizationChina Postdoctoral Science Foundation[20090460497]; Foundation for the Youth Teacher of MUC[0910KYQN65, 0910KYZY54]
Indexed BySCI
Language英语
Date Available2012-01-06
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22721
Collection半导体集成技术工程研究中心
Corresponding AuthorYang, FH (reprint author), Chinese Acad Sci, Inst Semicond, Engn Res Ctr Semicond Integrated Technol, Beijing 100083, Peoples R China, fhyang@semi.ac.cn
Recommended Citation
GB/T 7714
Geng ZX,Liu W,Wang XD,et al. A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering[J]. SENSORS AND ACTUATORS A-PHYSICAL,2011,169(1):37-42.
APA Geng ZX,Liu W,Wang XD,Yang FH,&Yang, FH .(2011).A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering.SENSORS AND ACTUATORS A-PHYSICAL,169(1),37-42.
MLA Geng ZX,et al."A route to apply Ag nanoparticle array integrated with microfluidic for surface enhanced Raman scattering".SENSORS AND ACTUATORS A-PHYSICAL 169.1(2011):37-42.
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