| A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS | |
| Xie J (Xie J.); Liu YF (Liu Y. F.); Zhang ML (Zhang M. L.); Yang JL (Yang J. L.); Yang FH (Yang F. H.) | |
| 2011 | |
| Conference Name | 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Source Publication | PROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208 |
| Conference Date | 2011 |
| Conference Place | Cancun, MEXICO |
| Subject Area | 微电子学 |
| Indexed By | CPCI（ISTP） |
| Language | 英语 |
| Document Type | 会议论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/22640 |
| Collection | 半导体集成技术工程研究中心 |
| Recommended Citation GB/T 7714 | Xie J ,Liu YF ,Zhang ML ,et al. A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS[C],2011. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| A SIMPLE METHOD FOR （2599KB） | 限制开放 | License | Application Full Text | |||
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