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A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS
Xie J (Xie J.); Liu YF (Liu Y. F.); Zhang ML (Zhang M. L.); Yang JL (Yang J. L.); Yang FH (Yang F. H.)
2011
Conference Name24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Source PublicationPROCEEDINGS: IEEE MICRO ELECTRO MECHANICAL SYSTEMS 页: 205-208
Conference Date2011
Conference PlaceCancun, MEXICO
Subject Area微电子学
Indexed ByCPCI(ISTP)
Language英语
Document Type会议论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22640
Collection半导体集成技术工程研究中心
Recommended Citation
GB/T 7714
Xie J ,Liu YF ,Zhang ML ,et al. A SIMPLE METHOD FOR EFFECTIVELY RESTRAIN ELECTROCHEMICAL CORROSION OF POLYCRYSTALLINE SILICON BY HF-BASED SOLUTIONS[C],2011.
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