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CMOS monolithic optoelectronic integrated circuit for on-chip optical interconnection
Huang BJ; Zhang X; Wang W; Dong Z; Guan N; Zhang ZY; Chen HD; Huang, BJ (reprint author), Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China. bjhuang@semi.ac.cn
2011
Source PublicationOPTICS COMMUNICATIONS
ISSN0030-4018
Volume284Issue:16-17Pages:3924-3927
AbstractA monolithic silicon CMOS optoelectronic integrated circuit (OEIC) is designed and fabricated using standard 0.35-mu m CMOS technology. This OEIC monolithically integrates light emitting diode (LED), silicon dioxide waveguide, photodetector and receiver circuit on a single silicon chip. The silicon LED operates in reverse breakdown mode and can emit light at 8.5 V. The output optical power is 31.2 nW under 9.8 V reverse bias. The measured spectrum of LED showed two peaks at 760 nm and 810 nm, respectively. The waveguide is composed of silicon dioxide/metal multiple layers. The responsivity of the n-well/p-substrate diode photodetector is 0.42 A/W and the dark current is 7.8 pA. The LED-emitted light transmits through the waveguide and can be detected by the photodetector. Experimental results show that on-chip optical interconnects are achieved by standard CMOS technology successfully. (C) 2011 Elsevier B.V. All rights reserved.
metadata_83集成光电子学国家重点实验室
KeywordDiode
Subject Area半导体器件
Funding OrganizationNational Nature Science Foundation of China[61036002, 60536030, 60877035, 60976026, 61076023, 90820002]; National Basic Research Program of China[2011CB933203, 2011CB933102]
Indexed BySCI
Date Available2011-09-14
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/22595
Collection集成光电子学国家重点实验室
Corresponding AuthorHuang, BJ (reprint author), Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China. bjhuang@semi.ac.cn
Recommended Citation
GB/T 7714
Huang BJ,Zhang X,Wang W,et al. CMOS monolithic optoelectronic integrated circuit for on-chip optical interconnection[J]. OPTICS COMMUNICATIONS,2011,284(16-17):3924-3927.
APA Huang BJ.,Zhang X.,Wang W.,Dong Z.,Guan N.,...&Huang, BJ .(2011).CMOS monolithic optoelectronic integrated circuit for on-chip optical interconnection.OPTICS COMMUNICATIONS,284(16-17),3924-3927.
MLA Huang BJ,et al."CMOS monolithic optoelectronic integrated circuit for on-chip optical interconnection".OPTICS COMMUNICATIONS 284.16-17(2011):3924-3927.
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