SEMI OpenIR  > 纳米光电子实验室
环形腔光子晶体垂直腔面发射激光器
郑婉华; 刘安金; 邢名欣; 渠宏伟; 周文君; 陈微; 陈良惠
Rights Holder中国科学院半导体研究所
Date Available2011-08-31
Country中国
Subtype发明
Abstract本发明公开了一种环形腔光子晶体垂直腔面发射激光器,其特征在于,该垂直腔面发射激光器由下至上依次由下电极(1)、n型衬底(2)、下DBR(3)、有源区(4)、氧化层(5)、刻有空气孔的上DBR(6)、p型盖层(7)和上环形电极(8)、空气孔区(9)和环形出光孔区(10)构成。其中,该垂直腔面发射激光器的上DBR表面的空气孔区为高损耗区,空气孔包围的环形区域为光输出区;该垂直腔面发射激光器的电极蒸镀在上DBR的p型盖层的表面和n型衬底的下表面。利用本发明,能实现相干耦合输出,提高激光器的输出功率,改善激光器的光束质量。
metadata_83纳米光电子实验室
Patent NumberCN200910081989.2
Language中文
Status公开
Application NumberCN200910081989.2
Patent Agent周国城
Document Type专利
Identifierhttp://ir.semi.ac.cn/handle/172111/22449
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
郑婉华,刘安金,邢名欣,等. 环形腔光子晶体垂直腔面发射激光器. CN200910081989.2.
Files in This Item:
File Name/Size DocType Version Access License
CN200910081989.2.pdf(741KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[郑婉华]'s Articles
[刘安金]'s Articles
[邢名欣]'s Articles
Baidu academic
Similar articles in Baidu academic
[郑婉华]'s Articles
[刘安金]'s Articles
[邢名欣]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[郑婉华]'s Articles
[刘安金]'s Articles
[邢名欣]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.