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光路可调的红外透射方法检测键合质量
何国荣; 王瑞春; 徐楚平; 郑婉华; 陈良惠
2010
Source Publication激光与红外
Volume40Issue:6Pages:644-647
Abstract基于红外透射原理,采用调节光路的冷光源方法搭建了晶片键合界面的质量检测系统. 利用该系统可以很好的实现GaAs, InP材料的键合界面检测和刀片分离时的在线监测,同时本文以GaAs基分布布拉格反射镜(DBR)和InP基有源区键合为例,结合红外透视图像和薄膜转移照片分析,对键合表面处理方法进行了优化选择. 试验表明该检测系统数据可靠,使用方便,为晶片键合条件及参数优化提供了实用平台
metadata_83纳米光电子实验室
Subject Area光电子学
Funding Organization国家自然科学基金项目,国家高技术研究发展计划,深圳信息学院青年自然科学基金项目
Indexed ByCSCD
Language中文
CSCD IDCSCD:3942692
Date Available2011-08-16
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21718
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
何国荣,王瑞春,徐楚平,等. 光路可调的红外透射方法检测键合质量[J]. 激光与红外,2010,40(6):644-647.
APA 何国荣,王瑞春,徐楚平,郑婉华,&陈良惠.(2010).光路可调的红外透射方法检测键合质量.激光与红外,40(6),644-647.
MLA 何国荣,et al."光路可调的红外透射方法检测键合质量".激光与红外 40.6(2010):644-647.
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