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单面键合面发射激光器的研制与分析
何国荣; 渠红伟; 郑婉华; 陈良惠
2010
Source Publication光通信技术
Volume34Issue:3Pages:40640
Abstract键合长波长垂直腔面发射激光器(VCSEL)的研制对于光通信的发展具有重要意义,可以有效克服传统外延生长方法的诸多难題.文章通过对布喇格反射镜、有源区和光学腔的设计,结合键合技术进行工艺设计,研制出单面键合长波长垂直腔面发射激光器,并对器件进行了光泵浦测试与分析.器件的光泵激射证明结构及工艺设计是合理的,键合后的界面可以承受腐蚀、剥离、氧化等后续工艺,且键合界面未对器件光学性能造成明显不良影响.
metadata_83纳米光电子实验室
Subject Area光电子学
Funding Organization深圳信息职业技术学院青年自然科学基金项目
Indexed ByCSCD
Language中文
CSCD IDCSCD:3859764
Date Available2011-08-16
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21714
Collection纳米光电子实验室
Recommended Citation
GB/T 7714
何国荣,渠红伟,郑婉华,等. 单面键合面发射激光器的研制与分析[J]. 光通信技术,2010,34(3):40640.
APA 何国荣,渠红伟,郑婉华,&陈良惠.(2010).单面键合面发射激光器的研制与分析.光通信技术,34(3),40640.
MLA 何国荣,et al."单面键合面发射激光器的研制与分析".光通信技术 34.3(2010):40640.
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