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光敏杂化溶胶-凝胶法研制多模干涉波导分束器
吴远大; 安俊明; 王王月; 尹小杰; 张家顺; 李建光; 王红杰; 胡雄伟
2010
Source Publication光电子·激光
Volume21Issue:10Pages:1452-1454
Abstract采用有机/无机杂化溶胶-凝胶方法制备高质量的SiO2薄膜和光敏性薄膜材料;利用三维FD-BPM(finitedifference beam propagation method)研究了掩埋式和暴露式矩形波导结构多模干涉(MMI)型光功率分束器的主要性能,理论模拟发现,掩埋式矩形波导结构分束器的长度,宽度和厚度容差性都优于暴露式矩形波导结构的MMI型分束器,并且具有更宽的带宽特性.通过简单的紫外曝光,显影工艺制备了1×4 MMI型波导分束器,分束器在1 550 nm波长附近的插入损耗为8.1~8.8 dB,功率分束不均匀性小于1 dB
metadata_83集成光电子学国家重点实验室
Subject Area光电子学
Funding Organization国家自然科学基金资助项目,国家"863"计划资助项目
Indexed ByCSCD
Language中文
CSCD IDCSCD:4050471
Date Available2011-08-16
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21540
Collection集成光电子学国家重点实验室
Recommended Citation
GB/T 7714
吴远大,安俊明,王王月,等. 光敏杂化溶胶-凝胶法研制多模干涉波导分束器[J]. 光电子·激光,2010,21(10):1452-1454.
APA 吴远大.,安俊明.,王王月.,尹小杰.,张家顺.,...&胡雄伟.(2010).光敏杂化溶胶-凝胶法研制多模干涉波导分束器.光电子·激光,21(10),1452-1454.
MLA 吴远大,et al."光敏杂化溶胶-凝胶法研制多模干涉波导分束器".光电子·激光 21.10(2010):1452-1454.
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