SEMI OpenIR  > 中科院半导体材料科学重点实验室
The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films
Hao HY; Xing J; Li WM; Zeng XB; Kong GL; Liao XB; Hao, HY, China. Univ Geosci, Sch Mat Sci & Technol, Beijing 100083, Peoples R China. huiyinghaol@cugb.edu.cn
2011
Source PublicationOPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS
ISSN1842-6573
Volume5Issue:40545Pages:112-115
metadata_83[hao, huiying; xing, jie; li, weimin] china univ geosci, sch mat sci & technol, beijing 100083, peoples r china; [zeng, xiangbo; kong, guanglin; liao, xianbo] chinese acad sci, inst semicond, key lab semicond mat sci, beijing 100083, peoples r china
KeywordNanocrystalline Silicon Thin Films Structure Photoelectrical Properties Stability Microcrystalline Silicon Transition Films Solar-cells Hydrogen
Subject Area半导体材料
Funding OrganizationOpen Foundation of Key Laboratory of Semiconductor Materials Science Institute of Semiconductors, Chinese Academy of Sciences [KLSMS-0907]; Science and Technology Foundation of China University of Geosciences [200705]
Indexed BySCI
Date Available2011-07-06
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21369
Collection中科院半导体材料科学重点实验室
Corresponding AuthorHao, HY, China. Univ Geosci, Sch Mat Sci & Technol, Beijing 100083, Peoples R China. huiyinghaol@cugb.edu.cn
Recommended Citation
GB/T 7714
Hao HY,Xing J,Li WM,et al. The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films[J]. OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS,2011,5(40545):112-115.
APA Hao HY.,Xing J.,Li WM.,Zeng XB.,Kong GL.,...&Hao, HY, China. Univ Geosci, Sch Mat Sci & Technol, Beijing 100083, Peoples R China. huiyinghaol@cugb.edu.cn.(2011).The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films.OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS,5(40545),112-115.
MLA Hao HY,et al."The effects of substrate temperature on the properties of diphasic nanocrystalline silicon thin films".OPTOELECTRONICS AND ADVANCED MATERIALS-RAPID COMMUNICATIONS 5.40545(2011):112-115.
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