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Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load
Zhu YF; Zhang FX; Yang JL; Zheng HY; Yang FH; Zhu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. yfzhu@semi.ac.cn; jlyang@semi.ac.cn
2011
Source PublicationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN1057-7157
Volume20Issue:1Pages:178-183
metadata_83[zhu, yinfang; zhang, fengxin; yang, jinling; zheng, haiyang; yang, fuhua] chinese acad sci, inst semicond, beijing 100083, peoples r china; [zhu, yinfang; zhang, fengxin; yang, jinling; zheng, haiyang] state key lab transducer technol, shanghai 200050, peoples r china
KeywordCyclic Mechanical Property Resonant Frequency Stability Submicrometer-thick Cantilever Energy-dissipation Structural Films Thin-films Fatigue
Subject Area微电子学
Funding OrganizationMinistry of Science and Technology of China [2009CB320305, 2011CB933102]
Indexed BySCI
Language英语
Date Available2011-07-06
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21333
Collection半导体集成技术工程研究中心
Corresponding AuthorZhu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. yfzhu@semi.ac.cn; jlyang@semi.ac.cn
Recommended Citation
GB/T 7714
Zhu YF,Zhang FX,Yang JL,et al. Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(1):178-183.
APA Zhu YF.,Zhang FX.,Yang JL.,Zheng HY.,Yang FH.,...&jlyang@semi.ac.cn.(2011).Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(1),178-183.
MLA Zhu YF,et al."Stability of Mechanical Properties for Submicrometer Single-Crystal Silicon Cantilever Under Cyclic Load".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.1(2011):178-183.
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