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An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions
Liu YF; Xie J; Zhang ML; Yang JL; Yang FH; Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn
2011
Source PublicationJOURNAL OF MICROELECTROMECHANICAL SYSTEMS
ISSN1057-7157
Volume20Issue:2Pages:470-475
metadata_83[liu, yunfei; xie, jing; zhang, mingliang; yang, jinling; yang, fuhua] chinese acad sci, inst semicond, beijing 100083, peoples r china; [liu, yunfei; xie, jing; yang, jinling] state key lab transducer technol, shanghai 200050, peoples r china
KeywordGalvanic Corrosion Polysilicon Resistivity Titanium (Ti) Redox Sacrificial Layer Polysilicon Oxidation
Subject Area微电子学
Funding OrganizationMinistry of Science and Technology of China [2009CB320305, 2011CB933102]
Indexed BySCI
Language英语
Date Available2011-07-06
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/21327
Collection半导体集成技术工程研究中心
Corresponding AuthorLiu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn
Recommended Citation
GB/T 7714
Liu YF,Xie J,Zhang ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(2):470-475.
APA Liu YF,Xie J,Zhang ML,Yang JL,Yang FH,&Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(2),470-475.
MLA Liu YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.2(2011):470-475.
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