An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions | |
Liu YF; Xie J; Zhang ML; Yang JL; Yang FH; Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn | |
2011 | |
Source Publication | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
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ISSN | 1057-7157 |
Volume | 20Issue:2Pages:470-475 |
metadata_83 | [liu, yunfei; xie, jing; zhang, mingliang; yang, jinling; yang, fuhua] chinese acad sci, inst semicond, beijing 100083, peoples r china; [liu, yunfei; xie, jing; yang, jinling] state key lab transducer technol, shanghai 200050, peoples r china |
Keyword | Galvanic Corrosion Polysilicon Resistivity Titanium (Ti) Redox Sacrificial Layer Polysilicon Oxidation |
Subject Area | 微电子学 |
Funding Organization | Ministry of Science and Technology of China [2009CB320305, 2011CB933102] |
Indexed By | SCI |
Language | 英语 |
Date Available | 2011-07-06 |
Document Type | 期刊论文 |
Identifier | http://ir.semi.ac.cn/handle/172111/21327 |
Collection | 半导体集成技术工程研究中心 |
Corresponding Author | Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn |
Recommended Citation GB/T 7714 | Liu YF,Xie J,Zhang ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(2):470-475. |
APA | Liu YF,Xie J,Zhang ML,Yang JL,Yang FH,&Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(2),470-475. |
MLA | Liu YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.2(2011):470-475. |
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