| An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions | |
| Liu YF; Xie J; Zhang ML; Yang JL; Yang FH; Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn | |
| 2011 | |
| Source Publication | JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
 |
| ISSN | 1057-7157 |
| Volume | 20Issue:2Pages:470-475 |
| metadata_83 | [liu, yunfei; xie, jing; zhang, mingliang; yang, jinling; yang, fuhua] chinese acad sci, inst semicond, beijing 100083, peoples r china; [liu, yunfei; xie, jing; yang, jinling] state key lab transducer technol, shanghai 200050, peoples r china |
| Keyword | Galvanic Corrosion Polysilicon Resistivity Titanium (Ti) Redox Sacrificial Layer Polysilicon Oxidation |
| Subject Area | 微电子学 |
| Funding Organization | Ministry of Science and Technology of China [2009CB320305, 2011CB933102] |
| Indexed By | SCI |
| Language | 英语 |
| Date Available | 2011-07-06 |
| Document Type | 期刊论文 |
| Identifier | http://ir.semi.ac.cn/handle/172111/21327 |
| Collection | 半导体集成技术工程研究中心 |
| Corresponding Author | Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn |
| Recommended Citation GB/T 7714 | Liu YF,Xie J,Zhang ML,et al. An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2011,20(2):470-475. |
| APA | Liu YF,Xie J,Zhang ML,Yang JL,Yang FH,&Liu, YF, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. jlyang@semi.ac.cn.(2011).An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions.JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,20(2),470-475. |
| MLA | Liu YF,et al."An Effective Approach for Restraining Galvanic Corrosion of Polycrystalline Silicon by Hydrofluoric-Acid-Based Solutions".JOURNAL OF MICROELECTROMECHANICAL SYSTEMS 20.2(2011):470-475. |
| Files in This Item: | ||||||
| File Name/Size | DocType | Version | Access | License | ||
| 201167.pdf（583KB） | 限制开放 | -- | Application Full Text | |||
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment