Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology

	Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology
	Zhang LZ; Cao Q; Zuo YH; Xue CL; Cheng BW; Wang QM; Zhang, LZ, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. zhang.labs@gmail.com; pobakey@semi.ac.cn; yhzuo@semi.ac.cn; clxue@semi.ac.cn; cbw@semi.ac.cn; qmwang@semi.ac.cn
	2011
Source Publication	IEEE PHOTONICS TECHNOLOGY LETTERS
ISSN	1041-1135
Volume	23 Issue:13 Pages:881-883
metadata_83	[zhang, lingzi; cao, quan; zuo, yuhua; xue, chunlai; cheng, buwen; wang, qiming] chinese acad sci, inst semicond, beijing 100083, peoples r china
Keyword	Resonant Cavity Enhanced (Rce) Photodetector Silicon Photonics Sol-gel Wafer Bonding Thermal Tuning Interfacial Energy Silicon-wafers High-speed Temperature Photodiodes Morphology Power
Subject Area	光电子学
Funding Organization	National Basic Research Program of China [2006CB302802]; National Natural Science Foundation [60676005, 60906035]; Chinese Academy of Sciences [ISCAS2009T01]
Indexed By	SCI
Language	英语
Date Available	2011-07-05
Document Type	期刊论文
Identifier	http://ir.semi.ac.cn/handle/172111/20945
Collection	集成光电子学国家重点实验室
Corresponding Author	Zhang, LZ, Chinese Acad Sci, Inst Semicond, Beijing 100083, Peoples R China. zhang.labs@gmail.com; pobakey@semi.ac.cn; yhzuo@semi.ac.cn; clxue@semi.ac.cn; cbw@semi.ac.cn; qmwang@semi.ac.cn
Recommended Citation GB/T 7714	Zhang LZ,Cao Q,Zuo YH,et al. Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology[J]. IEEE PHOTONICS TECHNOLOGY LETTERS,2011,23(13):881-883.
APA	Zhang LZ.,Cao Q.,Zuo YH.,Xue CL.,Cheng BW.,...&qmwang@semi.ac.cn.(2011).Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology.IEEE PHOTONICS TECHNOLOGY LETTERS,23(13),881-883.
MLA	Zhang LZ,et al."Wavelength-Tunable Si-Based InGaAs Resonant Cavity Enhanced Photodetectors Using Sol-Gel Wafer Bonding Technology".IEEE PHOTONICS TECHNOLOGY LETTERS 23.13(2011):881-883.

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