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Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment
Lu XF; Balocco C; Yang FH; Song AM; Lu, XF, Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, Englandxiaofeng.lu@manchester.ac.uk; claudio.balocco@manchester.ac.uk; fhyang@red.semi.ac.cn; a.song@manchester.ac.uk
2011
Source PublicationIEEE TRANSACTIONS ON NANOTECHNOLOGY
ISSN1536-125X
Volume10Issue:1Pages:53-58
metadata_83[lu, xiaofeng; balocco, claudio; song, aimin m.] univ manchester, sch elect & elect engn, manchester m13 9pl, lancs, england; [yang, fuhua] chinese acad sci, inst semicond, state key lab superlattices & microstruct, beijing 100083, peoples r china
KeywordAtomic-force Microscope (Afm) Nanolithography Self-switching Diodes (Ssds) 2-d Electron Gas Conducting Polymer-films Nanometer-scale Lithography Fabrication Surfaces Devices Nanostructures
Subject Area半导体物理
Funding OrganizationU.K. Technology Strategy Board ; Royal Society
Indexed BySCI
Language英语
Date Available2011-07-05
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20901
Collection半导体超晶格国家重点实验室
Corresponding AuthorLu, XF, Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, Englandxiaofeng.lu@manchester.ac.uk; claudio.balocco@manchester.ac.uk; fhyang@red.semi.ac.cn; a.song@manchester.ac.uk
Recommended Citation
GB/T 7714
Lu XF,Balocco C,Yang FH,et al. Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment[J]. IEEE TRANSACTIONS ON NANOTECHNOLOGY,2011,10(1):53-58.
APA Lu XF.,Balocco C.,Yang FH.,Song AM.,Lu, XF, Univ Manchester, Sch Elect & Elect Engn, Manchester M13 9PL, Lancs, Englandxiaofeng.lu@manchester.ac.uk.,...&a.song@manchester.ac.uk.(2011).Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment.IEEE TRANSACTIONS ON NANOTECHNOLOGY,10(1),53-58.
MLA Lu XF,et al."Highly Reproducible Nanolithography by Dynamic Plough of an Atomic-Force Microscope Tip and Thermal-Annealing Treatment".IEEE TRANSACTIONS ON NANOTECHNOLOGY 10.1(2011):53-58.
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