SEMI OpenIR  > 半导体材料科学中心
Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer
Zhao J; Hu LZ; Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com
2009
Source PublicationMATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING
ISSN1369-8001
Volume12Issue:6Pages:233-237
metadata_83[zhao, jie] chinese acad sci, inst semicond, ctr mat sci, beijing 100083, peoples r china; [zhao, jie; hu, lizhong] dalian univ technol, sch phys & optoelect technol, dalian 116024, peoples r china
KeywordZno Pulsed Laser Deposition X-ray Diffraction Photoluminescence Reflection High-energy Electron Diffraction Pulsed-laser Deposition Thin-films Pld Technique Growth Sapphire Temperature
Subject Area半导体材料
Funding OrganizationNational Natural Science Foundation of China [60777009]; Education Department of Liaoning Province [20060131]
Indexed BySCI
Language英语
Date Available2011-07-05
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20817
Collection半导体材料科学中心
Corresponding AuthorZhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com
Recommended Citation
GB/T 7714
Zhao J,Hu LZ,Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com. Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer[J]. MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2009,12(6):233-237.
APA Zhao J,Hu LZ,&Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com.(2009).Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer.MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,12(6),233-237.
MLA Zhao J,et al."Improvement in crystal quality of ZnO film on Si substrate by using a homo-buffer layer".MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 12.6(2009):233-237.
Files in This Item:
File Name/Size DocType Version Access License
201196.pdf(379KB) 限制开放--Application Full Text
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Zhao J]'s Articles
[Hu LZ]'s Articles
[Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com]'s Articles
Baidu academic
Similar articles in Baidu academic
[Zhao J]'s Articles
[Hu LZ]'s Articles
[Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Zhao J]'s Articles
[Hu LZ]'s Articles
[Zhao, J, Chinese Acad Sci, Inst Semicond, Ctr Mat Sci, Beijing 100083, Peoples R China. jiezhao_sub@163.com]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.