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Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation
Bai AQ (Bai Anqi); Cheng BW (Cheng Buwen); Wang XF (Wang Xiaofeng); Xue CL (Xue Chunlai); Zuo YH (Zuo Yuhua); Wang QM (Wang Qiming); Cheng, BW, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
2010
Source PublicationJOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY
Volume10Issue:11 Sp. Iss. SIPages:7428-7431
AbstractA convenient fabrication technology for large-area, highly-ordered nanoelectrode arrays on silicon substrate has been described here, using porous anodic alumina (PAA) as a template. The ultrathin PAA membranes were anodic oxidized utilizing a two-step anodization method, from Al film evaporated on substrate. The purposes for the use of two-step anodization were, first, improving the regularity of the porous structures, and second reducing the thickness of the membranes to 100 similar to 200 nm we desired. Then the nanoelectrode arrays were obtained by electroless depositing Ni-W alloy into the through pores of PAA membranes, making the alloy isolated by the insulating pore walls and contacting with the silicon substrates at the bottoms of pores. The Ni-W alloy was also electroless deposited at the back surface of silicon to form back electrode. Then ohmic contact properties between silicon and Ni-W alloy were investigated after rapid thermal annealing. Scanning electron microscopy (SEM) observations showed the structure characteristics, and the influence factors of fabrication effect were discussed. The current voltage (I-V) curves revealed the contact properties. After annealing in N-2 at 700 degrees C, good linear property was shown with contact resistance of 33 Omega, which confirmed ohmic contacts between silicon and electrodes. These results presented significant application potential of this technology in nanosize current-injection devices in optoelectronics, microelectronics and bio-medical fields.
metadata_24其它
KeywordAnodic Alumina Films Nanowire Arrays Porous Alumina Nanocrystals
Subject Area光电子学
Indexed BySCI
Language英语
Date Available2010-11-30
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20650
Collection集成光电子学国家重点实验室
Corresponding AuthorCheng, BW, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China.
Recommended Citation
GB/T 7714
Bai AQ ,Cheng BW ,Wang XF ,et al. Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation[J]. JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,2010,10(11 Sp. Iss. SI):7428-7431.
APA Bai AQ .,Cheng BW .,Wang XF .,Xue CL .,Zuo YH .,...&Cheng, BW, Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China..(2010).Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation.JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY,10(11 Sp. Iss. SI),7428-7431.
MLA Bai AQ ,et al."Fabrication of Silicon-Based Template-Assisted Nanoelectrode Arrays and Ohmic Contact Properties Investigation".JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY 10.11 Sp. Iss. SI(2010):7428-7431.
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