SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
高纯气体中痕量金属杂质的测定
崔仙航; 徐学敏; 严性天; 郎文卉
1989
Source Publication半导体学报
Volume10Issue:12Pages:945
metadata_83中科院半导体所
Subject Area半导体物理
Funding Organization国家自然科学基金
Indexed ByCSCD
Language中文
CSCD IDCSCD:85625
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20625
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
崔仙航,徐学敏,严性天,等. 高纯气体中痕量金属杂质的测定[J]. 半导体学报,1989,10(12):945.
APA 崔仙航,徐学敏,严性天,&郎文卉.(1989).高纯气体中痕量金属杂质的测定.半导体学报,10(12),945.
MLA 崔仙航,et al."高纯气体中痕量金属杂质的测定".半导体学报 10.12(1989):945.
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