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硅中铂族金属掺杂剂的萃取分离及测定
崔仙航; 刘鲁娜
1989
Source Publication光谱学与光谱分析
Volume9Issue:3Pages:77
Abstract本工作采用溶剂萃取分离法及石墨炉原子吸收测定法建立了分离Pd-Pt-Ir及Pd-Rh-Ir的方法, 分析测定了掺Pd-Pt, Pd-Pt-Ir及Pd-Rh-Ir的硅样品中铂族元素在硅中的纵向分布。
metadata_83中科院半导体所
Subject Area半导体化学
Indexed ByCSCD
Language中文
CSCD IDCSCD:92299
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20539
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
崔仙航,刘鲁娜. 硅中铂族金属掺杂剂的萃取分离及测定[J]. 光谱学与光谱分析,1989,9(3):77.
APA 崔仙航,&刘鲁娜.(1989).硅中铂族金属掺杂剂的萃取分离及测定.光谱学与光谱分析,9(3),77.
MLA 崔仙航,et al."硅中铂族金属掺杂剂的萃取分离及测定".光谱学与光谱分析 9.3(1989):77.
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