SEMI OpenIR  > 中国科学院半导体研究所(2009年前)
薄膜SOI结构中反型厚度与薄膜厚度的关系
夏永伟; 王守武
1990
Source Publication半导体学报
Volume11Issue:12Pages:962
metadata_83中科院半导体所
Subject Area半导体材料
Indexed ByCSCD
Language中文
CSCD IDCSCD:112262
Date Available2010-11-23
Citation statistics
Document Type期刊论文
Identifierhttp://ir.semi.ac.cn/handle/172111/20509
Collection中国科学院半导体研究所(2009年前)
Recommended Citation
GB/T 7714
夏永伟,王守武. 薄膜SOI结构中反型厚度与薄膜厚度的关系[J]. 半导体学报,1990,11(12):962.
APA 夏永伟,&王守武.(1990).薄膜SOI结构中反型厚度与薄膜厚度的关系.半导体学报,11(12),962.
MLA 夏永伟,et al."薄膜SOI结构中反型厚度与薄膜厚度的关系".半导体学报 11.12(1990):962.
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